Service :: Trion Technology :: Power of Simplicity :: Manufacturer of Plasma Etch & Deposition Systems Since 1989

Customer Service:

If you are an existing customer and would like to reach Trion's Customer Service Department,
click here

Process support prior to/subsequent to purchase
Pre-installation
Installation
Start-up
One year warranty
Service contract

System manuals
System maintenance
Free phone support
Process recipes
System spare parts
Training

Announcements:

•	July 9, 2009: Asia region Service Center
•	June 18, 2009: Annual Preventative Maintenance program
•	March 10, 2008: Service Department moved from Tempe, Arizona to Clearwater, Florida

Field Upgrades

January 2010
The newly redesigned Trion Technology AC distribution module makes use of a printed circuit board to house the various components and thus eliminates 90% of the wiring that had been required previously. This increases the reliability and durability of the module.

The design now also incorporates MOVs (metal-oxide varistors) to give the circuitry surge protection. The new design increases the single-phase outlet connectors from four to six to more readily power the various components used on the system such as turbo pumps, RF generators, etc. Each of the six outlets has its own dedicated fuse.

A new single 24Vdc power supply capable of delivering up to 500Watts has replaced two independent power supplies. This is an increase of about 250Watts. In addition, there are now six output connectors for the 24Vdc power. This allows easier and cleaner cabling to power the various devices that need 24Vdc on the tool.

The AC distribution can be built up in either single-phase or three-phase configurations, depending on the power requirements for the equipment on the tool.

February 2008
Trion Technology introduces a new PLC design as part of our continuing quality improvement program.

The PLC incorporates our new compact industrial computer, which operates off LabView software. ( The reliability of the industrial computer is 35KHrs MTBF.) We first introduced this to our production systems 12 months ago, and we are now offering it as upgrade package to our legacy customer base.

It is a programmable PLC (programmable logic controller) written in machine code, which makes software more reliable. Part of Trion's philosophy is simplicity and the new PLC system continues that philosophy by introducing simpler point-to-point interconnects which facilitates a decrease in installation time and an increase in ease of maintenance.

What Our Customers Say

“Thank you for the prompt response and the information. I find it so refreshing when I encounter a company such as Trion that will take the time to give suggestions as to where to go for an item when they can't provide it. “
Regards,
Robert (Bob) Brebber
Specialist Technician – NanoFab
University of Alberta

" Again I want to once again dearly thank you for your kind help throughout this whole issue. Your after sales service team and yourself are truly brilliant and I would always recommend your company in the future."

Best regards,
Arash Hajjam
Licensed PE (Colorado)
PhD Candidate, Electrical Engineering
M.Sc, Bio-Electrical Engineering
Department of Electrical and Computer Engineering
University of Denver
www.engr.du.edu/nemslab/arash.html

"We just wanted to drop a quick note, to thank Trion. Recently John visited with us to install and upgrade our Trion RIE tool. John was extremely knowledgeable and professional, he knew exactly what to do, and completed the services in a timely manner. It was a pleasure working with John. Thank you for your great support!"

- Shannon Smith, AMD

“Thank you for the excellent service and the prompt turnaround. It is greatly appreciated. If every one of our tool suppliers operated like Trion my life would be a lot easier.”
Regards,
Robert (Bob) Brebber
Specialist Technician – NanoFab
University of Alberta

“Continuing to do courtesy service on our older, out-of-warranty machines has really sold me on excellent customer service.”

“Super job! Very knowledgeable. He fixed several additional issues with the tool he spotted. He also looked at an additional tool in the CFA Lab. Thanks a million.”

“Thanks for having a crack at etching our InP-based material and we will keep your suggestions in mind. We have had some great success getting the Trion systems online and we are using them extensively in our InP-based VCSEL product development. You’ll also be pleased to know that the ICP/RIE system you assisted me with at Trion is working like a charm.” – E.S.

“I really have to thank you for such a timely response on our service call. Your technician was great, we really needed our machine up and running by this morning so yesterday he worked at our lab until midnight and made it happen! Really nice of him, and thanks again!” – L.O.

“Thanks! I have really enjoyed working with Trion. This was my first experience evaluating, purchasing and installing a piece of equipment for this company, and the customer service and general responsiveness from Trion made everything possible.” – M.K.

“I have been very pleased with the continued support with respect of answering emails, returning phone calls, and timely on site visits.”

“They did a fantastic job addressing the various system problems that we faced - the efforts were appreciated. Quick response by Trion to the various software and hardware issues allowed us to successfully meet a critical DOE deadline for lab readiness.”