Products - Lab Platform - Phantom :: Trion Technology :: Power of Simplicity :: Manufacturer of Plasma Etch & Deposition Systems Since 1989

News & Events - News Archive

Back to News Page

2006 November 2006 Trion sets up a service office for Malaysia, Singapore, Thailand and Philippines October 2006 350th machine ships. July 2006 At SEMICON West 2006, Trion introduces the Apollo: an affordable photoresist stripper. January 2006 University of Massachusetts receives $700K grant to establish Nano-Imprint Lithography Lab (Trion Phantom RIE). Read full article here www.nanotechnology.com

2005 Trion develops and releases a competitively-priced multi-chamber photoresist stripper. Trion releases a DRIE system for MEMS applications.

2004 December 2004 300th machine ships.

2002 Trion sets up an on-site 12,000 sq. ft. machine shop in Clearwater, enabling faster production and more competitive pricing.

2001 Trion completes a 4,000 sq. ft. expansion to the Tempe facility. Trion moves all manufacturing operations to a 10,000 sq. ft. building in Clearwater. June 2001 200th machine ships.

2000 Trion delivers the first fully-automated systems for high volume production. Trion sets up a fully equipped lab for demo and process development in Tempe. Trion purchases and moves into new, larger facilities on South 52nd Street in Tempe. June 2000 150th machine ships.

1998 April 1998 Trion introduces the Oracle, a flexible, low-cost turnkey cluster tool capable of supporting independent process reaction chambers for etch, deposition and sputtering of chlorinated or fluorinated chemistries.

1997 Trion expands into a new facility on Park Lane in Tempe.

1996 Trion expands sales and services offices in Europe and Asia. June 1996 50th machine ships.

1995 Trion begins manufacturing and service of the Orion PECVD system and Phantom RIE tool to semiconductor research and development companies, universities and foundries.

1994 Trion begins a joint development project with SEMATECH on liquid source silicon nitride, elimination of silane for safety concerns. Trion relocates to Tempe, Arizona. March 1994 25th machine ships.

1993 Trion begins manufacturing and service of the Minilock-Phantom (a loadlocked RIE tool) to semiconductor research and development companies, universities and foundries.

1990 September 1990 Trion delivers the first tool to AMD.

1989 Addison (Randy) Crockett establishes Trion Technology, Inc. in Austin, Texas.